Spectroscopic ellipsometry study of non-hydrogenated fully amorphous silicon films deposited by room-temperature radio-frequency magnetron sputtering on glass: Influence of the argon pressure
E. Márquez, E. Blanco, Concepción García Vázquez, J.M. Díaz, Elías Saugar
Topics & Concepts
Materials scienceAmorphous solidAmorphous siliconSputteringArgonSiliconAnalytical Chemistry (journal)EllipsometrySputter depositionThin filmHydrogenCrystalline siliconOptoelectronicsAtomic physicsChemistryNanotechnologyCrystallographyPhysicsOrganic chemistryChromatographyThin-Film Transistor TechnologiesSilicon Nanostructures and PhotoluminescenceGlass properties and applications