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Study on subsurface damage mechanism of gallium nitride in nano-grinding

Chaoyue Zhang, Zhigang Dong, Song Yuan, Xiaoguang Guo, Renke Kang, Dongming Guo

2021Materials Science in Semiconductor Processing42 citationsDOI

Topics & Concepts

Materials scienceGrindingNano-Gallium nitrideGalliumMechanism (biology)MetallurgyNitrideNanotechnologyComposite materialLayer (electronics)EpistemologyPhilosophyAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research
Study on subsurface damage mechanism of gallium nitride in nano-grinding | Litcius