Study on subsurface damage mechanism of gallium nitride in nano-grinding
Chaoyue Zhang, Zhigang Dong, Song Yuan, Xiaoguang Guo, Renke Kang, Dongming Guo
Topics & Concepts
Materials scienceGrindingNano-Gallium nitrideGalliumMechanism (biology)MetallurgyNitrideNanotechnologyComposite materialLayer (electronics)EpistemologyPhilosophyAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research