Performance and improvement of cleanroom environment control system related to cold-heat offset in clean semiconductor fabs
Jiawen Yin, Xiaohua Liu, Bowen Guan, Tao Zhang
Topics & Concepts
CleanroomAir conditioningOffset (computer science)SchematicEngineeringAutomotive engineeringWater chillerFan coil unitChillerControl systemSemiconductor device fabricationHeat exchangerEnvironmental scienceProcess engineeringElectrical engineeringMechanical engineeringComputer scienceRefrigerantWaferProgramming languageQuantum mechanicsThermodynamicsPhysicsBuilding Energy and Comfort OptimizationInfection Control and VentilationAdsorption and Cooling Systems