Study on the mechanism of chemical mechanical polishing on high-quality surface of single crystal diamond
Longxing Liao, Shanming Luo, Xuefeng Chang, Shengbo Li, Denis Shutin
Topics & Concepts
Materials sciencePolishingX-ray photoelectron spectroscopyScanning electron microscopeSurface roughnessDiamondChemical engineeringBreakageSingle crystalAdsorptionChemical-mechanical planarizationTransmission electron microscopyChemical bondComposite materialNanotechnologyCrystallographyChemistryOrganic chemistryEngineeringDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesTunneling and Rock Mechanics