Combining <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" altimg="si65.svg" display="inline" id="d1e343"><mml:msub><mml:mrow><mml:mi>H</mml:mi></mml:mrow><mml:mrow><mml:mi>∞</mml:mi></mml:mrow></mml:msub></mml:math> and resonant control to enable high-bandwidth measurements with a MEMS force sensor
Diyako Dadkhah, S. O. Reza Moheimani
Topics & Concepts
Tracking (education)Bandwidth (computing)Computer scienceController (irrigation)SetpointAlgorithmControl theory (sociology)Artificial intelligenceControl (management)TelecommunicationsPedagogyAgronomyPsychologyBiologyMechanical and Optical ResonatorsForce Microscopy Techniques and ApplicationsAdvanced MEMS and NEMS Technologies