Thermal stability of ultra thin Zr-B-N films as diffusion barrier between Cu and Si
Yongpeng Meng, Zhongxiao Song, Y.H. Li, Dan Qian, Wei Hu, Kewei Xu
Topics & Concepts
Diffusion barrierAmorphous solidMaterials scienceAnnealing (glass)Thermal stabilityThin filmSputter depositionSputteringElectrical resistivity and conductivityAnalytical Chemistry (journal)Chemical engineeringCrystallographyNanotechnologyComposite materialChemistryLayer (electronics)Electrical engineeringEngineeringChromatographyCopper Interconnects and ReliabilitySemiconductor materials and devicesSemiconductor materials and interfaces