Effect of sputtering pressure on the optical and electrical properties of ITO film on fluorphlogopite substrate
Hai Zhang, Hua Zhu, Tianhao Zhang, Shijin Yu, Pingchun Guo, Yanxiang Wang, Zhisheng Yang
Topics & Concepts
SputteringSubstrate (aquarium)Materials scienceOptoelectronicsThin filmNanotechnologyComposite materialGeologyOceanographyZnO doping and propertiesGas Sensing Nanomaterials and SensorsThin-Film Transistor Technologies