Effect of Etched Silicon Substrate on Structural, Morphological, and Optical Properties of Deposited ZnO Films via DC Sputtering
B. Abdallah, R. Hussin, Walaa Zetoune
Topics & Concepts
Materials scienceSubstrate (aquarium)SiliconEtching (microfabrication)PhotoluminescenceSputteringSputter depositionSurface finishSurface roughnessMorphology (biology)Chemical engineeringThin filmOptoelectronicsNanotechnologyComposite materialLayer (electronics)GeologyGeneticsOceanographyEngineeringBiologyZnO doping and propertiesGas Sensing Nanomaterials and SensorsCopper-based nanomaterials and applications