An effective KOH solution etching method in defect characterization of (100) β-Ga2O3
Xu Gao, Junguo He, Da Liu, Yingying Liu, Yuchao Yan, Di Wu, Zhu Jin, Ning Xia, Hui Zhang, Deren Yang
Topics & Concepts
Materials scienceCharacterization (materials science)Etching (microfabrication)Dry etchingChemical engineeringProcess engineeringComposite materialNanotechnologyLayer (electronics)EngineeringGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques