Effects of nitrogen flow rate on the microstructure and mechanical and tribological properties of TiAlN films prepared via reactive magnetron sputtering
Xiaoyan Niu, Guoqiang Dong, Shaoteng Wei, Yujiang Wang, Bo Wang, Haoliang Tian
Topics & Concepts
Materials scienceMicrostructureAbrasiveTribologySputter depositionComposite materialCeramicVolumetric flow rateCavity magnetronElastic modulusTitaniumSputteringMetallurgySubstrate (aquarium)Thin filmNanotechnologyPhysicsQuantum mechanicsOceanographyGeologyMetal and Thin Film MechanicsAdvanced ceramic materials synthesisDiamond and Carbon-based Materials Research