Effect of mid-frequency pulse insertion on the microstructural and mechanical properties of AlTiN coatings prepared using superimposed HiPIMS process
Fu-Chi Yang, Ching-Yen Lin, Jian-Fu Tang, Chi-Lung Chang
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceMicrostructureComposite materialThin filmTinSputter depositionAnalytical Chemistry (journal)MetallurgySputteringNanotechnologyChromatographyChemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials