Progress in low dielectric polyimide film – A review
Yahui Li, Gaohui Sun, Yu Zhou, Guangmin Liu, Jun Wang, Shihui Han
Topics & Concepts
PolyimideMicroelectronicsMaterials scienceDielectricThermal stabilityPolymerComposite materialEngineering physicsOptoelectronicsNanotechnologyChemical engineeringPhysicsLayer (electronics)EngineeringSynthesis and properties of polymersDielectric materials and actuatorsSilicone and Siloxane Chemistry