Silicon-carbide-based MEMS for gas detection applications
Jean-François Michaud, Marc Portail, Daniel Alquier, Dominique Certon, Isabelle Dufour
Topics & Concepts
MicrosystemMicroelectromechanical systemsSilicon carbideReliability (semiconductor)Layer (electronics)Computer scienceCoatingLead (geology)Materials scienceNanotechnologyQuantum mechanicsGeologyGeomorphologyPhysicsPower (physics)MetallurgyGas Sensing Nanomaterials and SensorsAdvanced MEMS and NEMS TechnologiesMechanical and Optical Resonators