On the double resonance activation of electrostatically actuated microbeam based resonators
Hassen M. Ouakad, Mohammad H. Hasan, Nizar Jaber, Md Abdullah Al Hafiz, Fadi Alsaleem, Mohammad I. Younis
Topics & Concepts
MicrobeamResonance (particle physics)RLC circuitMicroelectromechanical systemsResonatorVoltageActuatorMechanical resonanceExcitationMaterials scienceNonlinear systemAcousticsOptoelectronicsPhysicsCapacitorVibrationEngineeringElectrical engineeringOpticsAtomic physicsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies