Morphological characteristics and formation mechanism of latent scratches in chemical mechanical polishing
Xiaolong Han, Zhuji Jin, Qing Mu, Ying Yan, Ping Zhou
Topics & Concepts
Materials sciencePolishingContact areaGaussianLatent inhibitionComposite materialTransmission electron microscopyNanotechnologyChemistryMathematicsConditioningStatisticsComputational chemistryClassical conditioningAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMetal and Thin Film Mechanics