Litcius/Paper detail

The anisotropy dependence of deformation mechanism of cleavage planes in β-Ga2O3 single crystal

Tong Hou, Wangyang Zhang, Wenxiang Mu, Chen Li, Xinru Li, Xu Ma, Jin Zhang, Huanyang Wang, Zhitai Jia, Duo Liu, Xutang Tao

2023Materials Science in Semiconductor Processing24 citationsDOI

Topics & Concepts

Materials scienceCleavage (geology)IndentationWaferStackingNanoindentationBrittlenessAnisotropyComposite materialDeformation mechanismDeformation (meteorology)CrystallographyFracture (geology)OpticsNanotechnologyMicrostructureNuclear magnetic resonancePhysicsChemistryGa2O3 and related materialsSemiconductor materials and devicesZnO doping and properties