Effect of positive pulse voltage in bipolar reactive HiPIMS on crystal structure, microstructure and mechanical properties of CrN films
Šárka Batková, Jiří Čapek, J. Rezek, R. Čerstvý, P. Zeman
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceMicrostructureSubstrate (aquarium)IonBiasingVoltagePlasmaAcceleration voltageComposite materialThin filmNanotechnologySputter depositionSputteringElectrical engineeringChemistryCathode rayOrganic chemistryGeologyElectronEngineeringQuantum mechanicsPhysicsOceanographyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials