Materials removal mechanism of single crystalline SiC with laser-induced periodic surface structures (LIPSS)
Pei Chen, Zhuangzhuang Chi, Rui Pan, Fei Qin, Pei Qiu, Jiaxu Huang, Shaolin Xu
Topics & Concepts
Materials scienceMachinabilityLaserComposite materialSurface modificationMachiningBrittlenessIndentationScratchSilicon carbideHardnessMicrostructureOpticsMetallurgyMechanical engineeringPhysicsEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques