Multiscale CFD modelling for conformal atomic layer deposition in high aspect ratio nanostructures
Yuanxiao Chen, Zoushuang Li, Ziao Dai, Fan Yang, Yanwei Wen, Bin Shan, Rong Chen, Rong Chen
Topics & Concepts
Atomic layer depositionNanostructureAspect ratio (aeronautics)Materials scienceComputational fluid dynamicsNanotechnologyDeposition (geology)Conformal coatingCoatingThin filmMechanicsComposite materialPhysicsSedimentBiologyPaleontologySemiconductor materials and devicesCatalytic Processes in Materials ScienceElectronic and Structural Properties of Oxides