Modeling and optimizing femtosecond laser process parameters for high-efficient and near damage-free micromachining of single-crystal GaN substrate
Huilai Wei, Chuanzhen Huang, Hanlian Liu, Dun Liu, Peng Yao, Dongkai Chu
Topics & Concepts
Materials scienceFemtosecondLaserGallium nitrideSurface micromachiningSubstrate (aquarium)OptoelectronicsLaser power scalingResponse surface methodologyOpticsComposite materialComputer scienceFabricationPhysicsMachine learningOceanographyGeologyMedicineLayer (electronics)PathologyAlternative medicineLaser Material Processing TechniquesSurface Roughness and Optical MeasurementsOcular and Laser Science Research