Investigation on chemical mechanical polishing of Ga-faced GaN crystal with weak alkaline slurry
Qiubo Li, Lei Liu, Jiaoxian Yu, Shouzhi Wang, Guodong Wang, Zhongxin Wang, Zhanguo Qi, Xuanyi Zhao, Guangxia Liu, Xiangang Xu, Lei Zhang
Topics & Concepts
SlurryChemical-mechanical planarizationPolishingMaterials scienceSurface roughnessCrystal (programming language)Surface finishCrystal structureChemical engineeringMetallurgyNanotechnologyComposite materialCrystallographyChemistryComputer scienceProgramming languageEngineeringSemiconductor materials and devicesMetal and Thin Film MechanicsGaN-based semiconductor devices and materials