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Microstructure and tribological behavior in ta-C films prepared by laser-induced filtered cathodic vacuum arc technique: Effect of charge voltage

Jun Zheng, Zhengxuan Lu, Shuai Liu, Ji Cheng Ding, Songlin Ran, Ji Sun

2023Vacuum12 citationsDOI

Topics & Concepts

Materials scienceMicrostructureWork functionTribologyComposite materialVacuum arcBiasingVoltageSurface roughnessIonAnalytical Chemistry (journal)CathodeLayer (electronics)Electrical engineeringChemistryEngineeringOrganic chemistryChromatographyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced materials and composites
Microstructure and tribological behavior in ta-C films prepared by laser-induced filtered cathodic vacuum arc technique: Effect of charge voltage | Litcius