Systematic study of FIB-induced damage for the high-quality TEM sample preparation
Jun Uzuhashi, Tadakatsu Ohkubo
Topics & Concepts
Focused ion beamMaterials scienceGallium nitrideTransmission electron microscopySample preparationOptoelectronicsGalliumIndium gallium nitrideNanotechnologyIonChemistryMetallurgyOrganic chemistryChromatographyLayer (electronics)Integrated Circuits and Semiconductor Failure AnalysisAdvanced Electron Microscopy Techniques and ApplicationsIon-surface interactions and analysis