Finite-time adaptive sliding mode control for high-precision tracking of piezo-actuated stages
Zhongshi Wang, Rui Xu, Lina Wang, Dapeng Tian
Topics & Concepts
Control theory (sociology)Robustness (evolution)Nonlinear systemHysteresisSliding mode controlComputer scienceEngineeringControl engineeringControl (management)PhysicsGeneChemistryQuantum mechanicsBiochemistryArtificial intelligencePiezoelectric Actuators and ControlShape Memory Alloy TransformationsForce Microscopy Techniques and Applications