Etching of SiC–SiC-composites by a laser-induced plasma in a reactive gas
K. Zimmer, Martin Ehrhardt, Pierre Lorenz, Xi Wang, Pingping Wang, Shufeng Sun
Topics & Concepts
Materials scienceSilicon carbideComposite materialMachiningEtching (microfabrication)Delamination (geology)Laser ablationLaserPlasmaPlasma etchingComposite numberLayer (electronics)Laser beam machiningReactive-ion etchingOpticsMetallurgyLaser beamsBiologySubductionQuantum mechanicsTectonicsPaleontologyPhysicsAdvanced Surface Polishing TechniquesAdvanced Machining and Optimization TechniquesDiamond and Carbon-based Materials Research