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19-picometer mechanical step displacement measurement using heterodyne interferometer with phase-locked loop and piezoelectric driving flexure-stage

Thanh Dong Nguyen, Quang Anh Duong, Masato Higuchi, Thanh Tung Vu, Dong Wei, Masato Aketagawa

2020Sensors and Actuators A Physical28 citationsDOI

Topics & Concepts

Phase-locked loopInterferometryOpticsHeterodyne (poetry)PhysicsNoise floorPhase detectorAcousticsPhase noiseVoltageNoise measurementNoise reductionQuantum mechanicsAdvanced Measurement and Metrology TechniquesAdvanced Fiber Optic SensorsAdvanced MEMS and NEMS Technologies
19-picometer mechanical step displacement measurement using heterodyne interferometer with phase-locked loop and piezoelectric driving flexure-stage | Litcius