Structure design and optimization of SOI high-temperature pressure sensor chip
Xin Tang, Junwang Tian, Jiafeng Zhao, Zhong Jin, Yunpeng Liu, Junfu Liu, Taotao Chen, Junhui Li
Topics & Concepts
Wheatstone bridgePressure sensorSilicon on insulatorMaterials scienceDiaphragm (acoustics)Finite element methodChipStructural engineeringHydrostatic pressureElectronic engineeringSiliconEngineeringOptoelectronicsMechanical engineeringElectrical engineeringResistorMechanicsVoltageLoudspeakerPhysicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsNanowire Synthesis and Applications