AlScN films prepared by alloy targets and SAW device characteristics
Kuo Men, Hao Liu, Xingquan Wang, Qian Jia, Zhaochong Ding, Huating Wu, Daogao Wu, Yuhua Xiong
Topics & Concepts
Materials scienceElectromechanical coupling coefficientMicrostructureCrystallinityAlloyPiezoelectricityComposite materialSputter depositionSputteringOptoelectronicsThin filmNanotechnologyAcoustic Wave Resonator TechnologiesMetal and Thin Film MechanicsGaN-based semiconductor devices and materials