Molybdenum diselenide thin films grown by atomic layer deposition: An XPS analysis
Jhonatan Rodríguez‐Pereira, Raúl Zazpe, Jaroslav Charvot, Filip Bureš, Jan M. Macák
Abstract
Molybdenum diselenide (MoSe2) thin films were deposited on annealed titanium foils by atomic layer deposition using suitable precursors. In this paper, a detailed x-ray photoelectron spectroscopy analysis of the MoSe2 film is presented. Survey spectra, Mo 3d, Se 3d, Mo 3p, Se LMM, Se 3p, C 1s, and Se 4s core level along with the valence band spectra were measured. Quantitative analysis indicates a surface composition of MoSe1.8, suggesting a deficiency of selenium on the surface.
Topics & Concepts
X-ray photoelectron spectroscopyDiselenideMolybdenumAtomic layer depositionThin filmAnalytical Chemistry (journal)Materials scienceTitaniumSurface layerDeposition (geology)SeleniumSpectral lineValence bandLayer (electronics)Valence (chemistry)Annealing (glass)ChemistryMetallurgyBand gapNanotechnologyChemical engineeringOptoelectronicsBiologyPaleontologyEngineeringOrganic chemistryChromatographyAstronomySedimentPhysics2D Materials and ApplicationsChalcogenide Semiconductor Thin FilmsQuantum Dots Synthesis And Properties