Recent Design and Application Advances in Micro-Electro-Mechanical System (MEMS) Electromagnetic Actuators
Jianqun Cheng, Ning Xue, Bocang Qiu, Bo Qin, Qingchun Zhao, Gang Fang, Zhihui Yao, Wen‐Yi Zhou, Xuguang Sun
Abstract
Micro-electro-mechanical system (MEMS) electromagnetic actuators have rapidly evolved into critical components of various microscale applications, offering significant advantages including precision, controllability, high force density, and rapid responsiveness. Recent advancements in actuator design, fabrication methodologies, smart control integration, and emerging application domains have significantly broadened their capabilities and practical applications. This comprehensive review systematically analyzes the recent developments in MEMS electromagnetic actuators, highlighting core operating principles such as Lorentz force and magnetic attraction/repulsion mechanisms and examining state-of-the-art fabrication technologies, such as advanced microfabrication techniques, additive manufacturing, and innovative material applications. Additionally, we provide an in-depth discussion on recent enhancements in actuator performance through smart and adaptive integration strategies, focusing on improved reliability, accuracy, and dynamic responsiveness. Emerging application fields, particularly micro-optical systems, microrobotics, precision micromanipulation, and microfluidic components, are extensively explored, demonstrating how recent innovations have significantly impacted these sectors. Finally, critical challenges, including miniaturization constraints, integration complexities, power efficiency, and reliability issues, are identified, alongside a prospective outlook outlining promising future research directions. This review aims to serve as an authoritative resource, fostering further innovation and technological advancement in MEMS actuators and related interdisciplinary fields.