Gallium nitride deposition via magnetron sputtering: Linking plasma-surface interactions and thin film crystalline features
Lakshman Srinivasan, Kristaq Gazeli, Swaminathan Prasanna, Laurent Invernizzi, Pere Roca i Cabarrocas, G. Lombardi, Karim Ouaras
Topics & Concepts
SputteringSputter depositionMaterials scienceThin filmGalliumCrystallinityAnalytical Chemistry (journal)PlasmaNitrideSubstrate (aquarium)Gallium nitrideChemistryNanotechnologyMetallurgyComposite materialLayer (electronics)GeologyPhysicsQuantum mechanicsOceanographyChromatographyGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsPlasma Diagnostics and Applications