Litcius/Paper detail

Analysis of residual thermal stress for AlN crystal growth by PVT

Z.Y. Qin, Wei Li, Zhigang Sun, Jianhua Ji, Honglei Wu, Lei Jin

2023Vacuum17 citationsDOI

Topics & Concepts

Materials scienceResidual stressThermal expansionStress (linguistics)ThermalCrystal (programming language)Composite materialCompressive strengthRADIUSThermodynamicsPhysicsComputer securityProgramming languagePhilosophyComputer scienceLinguisticsGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsZnO doping and properties