The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition
A. P. Brady, Robert O’Connor, Silvia Armini, V. Selvaraju, Mattia Pasquali, G. Hughes, J. Bogan
Topics & Concepts
Atomic layer depositionX-ray photoelectron spectroscopyMonolayerSelf-assembled monolayerNanolithographyNanotechnologyEtching (microfabrication)Layer (electronics)Materials scienceAtomic layer epitaxyChemistryChemical engineeringFabricationPathologyEngineeringMedicineAlternative medicineSemiconductor materials and devicesElectronic and Structural Properties of OxidesMolecular Junctions and Nanostructures