Amplitude–frequency response of parametric resonance of electrostatically actuated MEMS clamped circular plate
Dumitru I. Caruntu, Reynaldo Oyervides
Topics & Concepts
VibrationAmplitudeResonatorResonance (particle physics)AcousticsParametric statisticsPhysicsNatural frequencyMicroelectromechanical systemsFrequency responseParametric oscillatorNormal modeNonlinear systemMultiple-scale analysisMechanicsEngineeringOpticsMathematicsElectrical engineeringOptoelectronicsAtomic physicsStatisticsQuantum mechanicsAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAcoustic Wave Resonator Technologies