Enhanced diffusion barrier property of nanolayered NbMoTaW/TiVCr high entropy alloy for copper metallization
Peng Li, Yue Ma, Hua Ma, Shiwo Ta, Zhuo Yang, Xue Han, Mei Kai, J.H. Chen, Zhenhua Cao
Topics & Concepts
Materials scienceAnnealing (glass)Diffusion barrierAmorphous solidTransmission electron microscopySilicideMicrostructureCopperThermal stabilityBarrier layerAlloyCrystallographyComposite materialMetallurgyNanotechnologyChemical engineeringSiliconLayer (electronics)ChemistryEngineeringHigh Entropy Alloys StudiesHigh-Temperature Coating BehaviorsAdvanced materials and composites