Optimization and fabrication of chromium grating in self-traceable interferometer
Zichao Lin, Yulin Yao, Zhangning Xie, Dongbai Xue, Tong Zhou, Zhaohui Tang, Lihua Lei, Tao Jin, Xiong Dun, Xiao Deng, Xinbin Cheng, Tongbao Li
Topics & Concepts
GratingMetrologyOpticsInterferometryPhotolithographyTraceabilityMaterials scienceLithographyDiffraction gratingDiffractionFabricationAstronomical interferometerOptoelectronicsNanotechnologyComputer sciencePhysicsMedicineAlternative medicineSoftware engineeringPathologyAdvanced Measurement and Metrology TechniquesSurface Roughness and Optical MeasurementsAdhesion, Friction, and Surface Interactions