Effects of nitrogen-argon flow ratio on the microstructural and mechanical properties of AlCrN coatings prepared using high power impulse magnetron sputtering
Jian-Fu Tang, Ching-Yen Lin, Fu-Chi Yang, Yi-Jing Tsai, Chi-Lung Chang
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceSputter depositionArgonAmorphous solidCavity magnetronDeposition (geology)MetallurgyComposite materialNitrogenAlloySputteringThin filmAnalytical Chemistry (journal)CrystallographyNanotechnologyChemistryGeologyChromatographySedimentPaleontologyOrganic chemistryMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsDiamond and Carbon-based Materials Research