MEMS-based piezoresistive and capacitive microphones: A review on materials and methods
Ashish Kumar, Arathy Varghese, Dheeraj Kalra, Anshuman Raunak, Jaiverdhan, Mahanth Prasad, Vijay Janyani, R. P. Yadav
Topics & Concepts
Piezoresistive effectCapacitive sensingMicroelectromechanical systemsMaterials scienceMiniaturizationMicrophoneCapacitanceAcousticsResonatorNanoelectromechanical systemsComputer scienceElectronic engineeringNanotechnologyElectrical engineeringOptoelectronicsEngineeringSound pressureElectrodePhysicsQuantum mechanicsNanoparticleNanomedicineAcoustic Wave Resonator TechnologiesAdvanced MEMS and NEMS TechnologiesInnovative Energy Harvesting Technologies