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The role of dipotassium ethylenediaminetetraacetic acid and potassium oleate on chemical mechanical planarization relevant to heterogeneous materials of cobalt interconnects

Lifei Zhang, Tongqing Wang, Shuhui Wang, Xinchun Lu

2023Materials Science in Semiconductor Processing11 citationsDOI

Topics & Concepts

Ethylenediaminetetraacetic acidChemical-mechanical planarizationMaterials scienceCobaltPassivationChemical engineeringInorganic chemistryChelationAdsorptionLayer (electronics)ChemistryOrganic chemistryNanotechnologyMetallurgyEngineeringCopper Interconnects and ReliabilitySemiconductor materials and devicesElectrodeposition and Electroless Coatings
The role of dipotassium ethylenediaminetetraacetic acid and potassium oleate on chemical mechanical planarization relevant to heterogeneous materials of cobalt interconnects | Litcius