Development of a Thickness Meter for Conductive Thin Films Using Four-Point Probe Method
Jeon-Hong Kang, Sanghwa Lee, Hyun Ruh, Kwang Min Yu
Topics & Concepts
Thin filmMaterials scienceElectrical resistivity and conductivityMetreSample (material)OpticsSemiconductorAccuracy and precisionSheet resistanceElectrical conductorOptoelectronicsComposite materialElectrical engineeringNanotechnologyEngineeringChemistryLayer (electronics)MathematicsAstronomyChromatographyPhysicsStatisticsSurface and Thin Film PhenomenaAdvancements in Photolithography TechniquesElectron and X-Ray Spectroscopy Techniques