Insight of mechanical and morphological properties of ALD- Al2O3 films in point of structural properties
Burak Nalçaci, Meryem Polat Gönüllü
Topics & Concepts
NanoindentationAnnealing (glass)Materials scienceThin filmScanning electron microscopeAtomic layer depositionSurface roughnessPassivationSurface finishChemical engineeringNanotechnologyComposite materialLayer (electronics)EngineeringSemiconductor materials and devicesMetal and Thin Film MechanicsZnO doping and properties