Litcius/Paper detail

A new ViT-Based augmentation framework for wafer map defect classification to enhance the resilience of semiconductor supply chains

Shu‐Kai S. Fan, Shang-Hao Chiu

2024International Journal of Production Economics27 citationsDOI

Topics & Concepts

WaferComputer scienceArtificial intelligenceSemiconductor device fabricationSupply chainPattern recognition (psychology)Reliability engineeringMaterials scienceEngineeringNanotechnologyBusinessMarketingIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques