Through-mask electrochemical micromachining of micro pillar arrays on aluminum
Yankui Sun, Siying Ling, Danyang Zhao, Jiyu Liu, Ziai Liu, Jinlong Song
Topics & Concepts
Materials sciencePillarSurface micromachiningEtching (microfabrication)WettingSubstrate (aquarium)NanotechnologySiliconOptoelectronicsCurrent densityBulk micromachiningIsotropic etchingContact angleAluminiumFabricationComposite materialLayer (electronics)Mechanical engineeringMedicineOceanographyGeologyQuantum mechanicsAlternative medicinePhysicsEngineeringPathologyAdvanced Machining and Optimization TechniquesAnodic Oxide Films and NanostructuresNanofabrication and Lithography Techniques