On-chip ultraviolet second-harmonic generation in lithium-tantalate thin film microdisk
Miao Xue, Xiongshuo Yan, Jiangwei Wu, Rui Ge, Tingge Yuan, Yuping Chen, Xianfeng Chen
Abstract
The compact and reliable ultraviolet (UV) source has attracted remarkable attention for its potential use in optical measurement systems, high-density optical storage, and biomedical applications. We demonstrate ultraviolet generation by frequency doubling in a lithium-tantalate-on-insulator (LTOI) microdisk via modal phase matching. The 50-µm-diameter microdisk was milled by a focused ion beam (FIB) and followed by chemo-mechanical polishing (CMP) to smooth the disk surface and edge, and the Q-factor reaches 2.74×105 in the visible band. On-chip UV coherent light with a wavelength of 384.3 nm was achieved, which shows great promise for using LTOIs in integrated ultraviolet source platforms.