Fully dense, highly conductive nanocrystalline TiN diffusion barrier on steel via reactive high power impulse magnetron sputtering
Pankaj Kumar, Seema Seema, Mukul Gupta, Sushobhan Avasthi
Topics & Concepts
High-power impulse magnetron sputteringTinMaterials scienceNanocrystalline materialDiffusion barrierSputteringSputter depositionElectrical resistivity and conductivityAnalytical Chemistry (journal)Thin filmMetallurgyComposite materialNanotechnologyChemistryLayer (electronics)Electrical engineeringChromatographyEngineeringMetal and Thin Film MechanicsCopper Interconnects and ReliabilityGaN-based semiconductor devices and materials