Fabrication of Comb-Structured Acceleration Sensors by Roll-to-Roll Gravure Printing
Sang Hoon Lee, Sangyoon Lee
2021International Journal of Precision Engineering and Manufacturing-Green Technology27 citationsDOI
Topics & Concepts
AccelerationMicroelectromechanical systemsFabricationPrinted electronicsElectronicsAir gap (plumbing)MicrofabricationCapacitanceElectrical engineeringMechanical engineeringEngineeringMaterials scienceOptoelectronicsElectrodePhysicsPathologyPhysical chemistryComposite materialChemistryMedicineAlternative medicineClassical mechanicsAdvanced Sensor and Energy Harvesting MaterialsAdvanced MEMS and NEMS TechnologiesElectrowetting and Microfluidic Technologies