Superimpose mechanism of surface generation process in grinding of monocrystalline silicon using molecular dynamics simulation
Pengyue Zhao, Bo Zhao, Jiansheng Pan, Jianwei Wu
Topics & Concepts
Monocrystalline siliconGrindingMaterials scienceSuperposition principleWaferSiliconMolecular dynamicsComposite materialMetallurgyNanotechnologyComputational chemistryChemistryPhysicsQuantum mechanicsAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchForce Microscopy Techniques and Applications