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Density functional theory study on the selective capping of cobalt on copper interconnect

Khabib Khumaini, Romel Hidayat, Tirta Rona Mayangsari, Tanzia Chowdhury, Hye-Lee Kim, Sang-Ick Lee, Won‐Jun Lee

2022Applied Surface Science17 citationsDOI

Topics & Concepts

Density functional theoryChemisorptionSilylationCobaltElectromigrationActivation energyCopperExothermic reactionChemistryEndothermic processSelectivitySubstrate (aquarium)Inorganic chemistryPhysical chemistryMaterials scienceComputational chemistryCatalysisAdsorptionOrganic chemistryComposite materialOceanographyGeologyCopper Interconnects and ReliabilitySemiconductor materials and devicesMolecular Junctions and Nanostructures
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