The effect of Ni content on gas-sensing behaviors of ZnO–NiO p–n composite thin films grown through radio-frequency cosputtering of ceramic ZnO and NiO targets
Yuan‐Chang Liang, Yen-Cheng Chang
Abstract
In this study, dual phase ZnO–NiO p–n composite thin films were grown through radio-frequency cosputtering of ceramic ZnO and NiO targets.
Topics & Concepts
Non-blocking I/OMaterials scienceCeramicComposite numberThin filmChemical engineeringComposite materialOptoelectronicsNanotechnologyChemistryBiochemistryEngineeringCatalysisGas Sensing Nanomaterials and SensorsZnO doping and propertiesTransition Metal Oxide Nanomaterials