Optomechanical inertial sensors
Adam Hines, Logan Richardson, Hayden Wisniewski, Felipe Guzman
Abstract
We present a performance analysis of compact monolithic optomechanical inertial sensors that describes their key fundamental limits and overall acceleration noise floor. Performance simulations for low-frequency gravity-sensitive inertial sensors show attainable acceleration noise floors on the order of <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mn>1</mml:mn> <mml:mo>×</mml:mo> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:msup> <mml:mn>10</mml:mn> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mo>−</mml:mo> <mml:mn>11</mml:mn> </mml:mrow> </mml:msup> </mml:mrow> <mml:mspace width="thickmathspace"/> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">m</mml:mi> </mml:mrow> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mo>/</mml:mo> </mml:mrow> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:msup> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">s</mml:mi> </mml:mrow> <mml:mn>2</mml:mn> </mml:msup> </mml:mrow> <mml:msqrt> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mi mathvariant="normal">H</mml:mi> <mml:mi mathvariant="normal">z</mml:mi> </mml:mrow> </mml:msqrt> </mml:math> . Furthermore, from our performance models, we devised an optimization approach for our sensor designs, sensitivity, and bandwidth trade space. We conducted characterization measurements of these compact mechanical resonators, demonstrating <mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"> <mml:mrow class="MJX-TeXAtom-ORD"> <mml:mtext class="MJX-tex-mathit" mathvariant="italic">mQ</mml:mtext> </mml:mrow> </mml:math> -products at levels of 250 kg, which highlight their exquisite acceleration sensitivity.